...Jae B. Kwak; Soonwan Chung Purpose This paper aims to present an adaptation of digital image correlation (DIC) to the electronics industry for reliability assessment of electronic packages. Two case studies are presented: one for warpage measurement of a micro-electro-mechanical system (MEMS...

... with Table II demonstrates that by changing the thinning pattern from edge-concentrated to the center-concentrated the deflection of the diaphragm in 3 μm thick membrane with 30 per cent thinning has been increased from 3.892 μm/kPa to 4.834 μm/kPa. Micro electro mechanical...

... rights only Micro Electro Mechanical Systems (MEMS) Piezoresistive sensors BioMEMS microfluidics Limit of detection (LOD) SAM (self assembled monolayer’s) Heavy metal ions (HMIs) Piezoresistivity is the most commonly used phenomenon for micro-nano film technology and Micro Electro...

... of the smallest available gap of 2 µm in SOIMUMPs®. Typically, the smallest gap is used for the stoppers, and capacitive gaps would in turn need to be at 2.25 µm or larger. In this design, by adopting a rotational setup, the 2 µm gap was still used for capacitive purposes. Micro electro mechanical systems...