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Keywords: Micro-electromechanical systems (MEMS)
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Journal Articles
Journal:
Microelectronics International
Microelectronics International 1–16.
Published: 15 July 2026
... only Piezoelectric micromachined ultrasonic transducer (PMUT) Micro-electromechanical systems (MEMS) Bimorph thin film Cantilever beam structure Finite element method Transmission performance Semiconductor technology thick/thin film sensors Natural Science Project of the Henan...
