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Keywords: Microelectroics fabrications
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Journal Articles
Recent advances and applications of abrasive processes for microelectronics fabrications
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2019) 36 (4): 150–159.
Published: 27 September 2019
... that hydrogen peroxide dominated the passivating process. Abrasive Chemical mechanical polishing Fan-out wafer level package Fracture strength Grinding Material removal rate Microelectroics fabrications Semiconductor device Slurry Sub-surface damage Surface finish Wafer warpage Cheng...
