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Keywords: Microfabrication
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Journal Articles
Muhammad Ahmad Raza Tahir, Muhammad Mubasher Saleem, Syed Ali Raza Bukhari, Amir Hamza, Rana Iqtidar Shakoor
Journal:
Microelectronics International
Microelectronics International (2021) 38 (4): 144–156.
Published: 17 August 2021
... reliability of these inertial sensors in comparison to traditional iterative microfabrication and experimental characterization approach. Design/methodology/approach A dual-axis capacitive MEMS accelerometer design is presented considering the microfabrication process constraints of the foundry process...
Journal Articles
Journal:
Microelectronics International
Microelectronics International (2002) 19 (3): 19–23.
Published: 01 December 2002
... demands are described. © MCB UP Limited 2002 Lasers Microfabrication 3D But the special features of the manufacturing process allow it to integrate non‐electrical functions very effectively. An important advantage is the possibility of processing LTCC in the “green”, non‐sintered...
