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Keywords: PZT
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Journal Articles
Electrical properties of Pb[Zr0.35Ti0.65]O3 on PEALD Al2O3 for NVM applications
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2018) 35 (4): 189–196.
Published: 01 October 2018
... were fabricated on the silicon substrate and pt electrode. Structural characteristics of the ferroelectric (PZT) and high-k (Al2O3) thin film deposited by RF sputtering and PEALD, respectively, were optimized and investigated for different process parameters. Metal/PZT/Metal...
Journal Articles
LTCC/PZT accelerometer in SMD package
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2014) 31 (3): 186–192.
Published: 04 August 2014
...Dr Agata Skwarek; Arkadiusz Dabrowski; Karl Elkjaer; Louise Borregaard; Tomasz Zawada; Leszek Golonka Purpose – The purpose of this paper is to develop the device made of low temperature co-fired ceramics (LTCC) and lead zirconate titanate (PZT) by co-firing both materials. In the paper...
