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Keywords: Passivation effect
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Journal Articles
Influence of the SiNx:H layer deposited by PECVD technique on the surface and grain boundary passivation of mc-Si
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Journal:
Microelectronics International
Microelectronics International (2016) 33 (3): 162–166.
Published: 01 August 2016
... measurements, external quantum efficiency was calculated, and the final results are shown graphically. The passivation effect concerning grain areas was evaluated more precisely by light-beam-induced current scan maps (LBIC). Findings The final impact of the type of passivation layer on surface and grain...
