...Darko Belavič; Andraž Bradeško; Tomaz Kos; Tadej Rojac Purpose In this contribution, the design and integration of a piezoelectric vibrating device into low-temperature, co-fired ceramic (LTCC) structures are presented and discussed. The mechanical vibration of the diaphragm was stimulated...

... and a lead borosilicate glass. Sample devices were fabricated using the two paste types and processed, using standard thick film techniques, before being poled under varying conditions. Samples were compared by measurement of piezoelectric charge constant, d₃₃ and using scanning electron...