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Keywords: Polyimide
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Journal Articles
Journal Articles
Microelectronics International (1998) 15 (1): 11–14.
Published: 01 April 1998
... by the use of a thick‐film overglaze or by coating the surface with polyimide prior to thin‐film processing. The improvements in conductor and via yield are measured by adequate test structures with a conductor width of 25µm. Based on the results, a process is given to provide a thick‐film...

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