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Keywords: Shielding electrode
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Journal Articles
Stress analysis of shielding electrode in chip with pressure sensor embedded in accelerometer
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2019) 36 (1): 35–42.
Published: 07 January 2019
... integrated sensing chips addresses the coefficient of thermal expansion (CTE) mismatch issue. The purpose of this study is to focus on the residual stress analysis of the shielding electrode, which is a metal film that prevents pull-in of proof-mass during anodic bonding in microelectromechanical system...
