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Keywords: Si3N4-polyimide membrane
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Journal Articles
Microfabrication of Si3N4-polyimide membrane for thermo-pneumatic actuator
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2015) 32 (1): 18–24.
Published: 05 January 2015
... 2015 Micro-electro-mechanical systems (MEMS) MEMS fabrication Si3N4-polyimide membrane Thermo pneumatic actuator Thermo-pneumatic micro-actuator is a promising future micro-electro-mechanical systems (MEMS) device within lab-on-chip and biomedical applications...
