Influence of temperature of substrate during the growth of a heterostructure on properties of materials

The purpose of this paper is to consider the changing of profile of heterostructure during growth with changing of temperature of substrate.

The authors introduced an analytical approach for the analysis of technological process.

The authors formulate the condition for minimization of changing of the profile.

The approach gives a possibility to analyze mass and heat transports in a heterostructure without cross-linking of solutions on interfaces between layers of the heterostructure with account nonlinearity of these transports and variation in time of their parameters.