A Feasibility Study for a Sans Investigation of a Heat Cured and Laser Machined Organic Resin Microturbine as Used for Airflow Sensing

In this paper, Gamma‐Butyrolactone (GLB) mixed with Triarylsulfonia and Hexafluroantimonate in the substrate of a microturbine is considered for a Small Angle Neutron Scattering (SANS) diagnostic study, paying particular attention to molecular orientations and other micro‐characteristics in connection with the mechanical properties of the substrate. The investigated microturbine is a new MEMS device for the first pioneering study of either gas or airflow sensing using the low pressurehead characteristics of axial‐flow. The substrate material of the microturbine is a negative photoresist composed of an epoxy resin organic solvent. This study wishes to demonstrate the feasibility of the SANS process for examining this substrate on the nano‐scale prior to a full materials investigation, which aims to provide both the information to both improve the characteristics and performance of the microturbine and estimate its maximum lifetime more accurately. The data could also be used to match microturbines to appropriate applications in either flow‐sensing or micro‐power generation in accordance with structural strength limits.