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Keywords: Dopant diffusion
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Journal Articles
Multidiscipline Modeling in Materials and Structures (2016) 12 (4): 672–677.
Published: 14 November 2016
..., the purpose of this paper is to introduce an approach of estimating the limited value of acceleration of the dopant diffusion by choosing the dependence of the dopant diffusion coefficient on the coordinates. Design/methodology/approach The authors analyzed relaxation of concentration of dopant during...
