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Keywords: MEMS
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Journal Articles
Multidiscipline Modeling in Materials and Structures (2008) 4 (2): 155–162.
Published: 01 February 2008
... micro‐characteristics in connection with the mechanical properties of the substrate. The investigated microturbine is a new MEMS device for the first pioneering study of either gas or airflow sensing using the low pressurehead characteristics of axial‐flow. The substrate material of the microturbine...
Journal Articles
Multidiscipline Modeling in Materials and Structures (2006) 2 (1): 83–93.
Published: 01 January 2006
...Wenchao Tian; Jianyuan Jia; Guiming Chen; Guangyan Chen The “Snap back” problem of the micro‐cantilever remains one of the dominant failure mechanisms in the Micro Electro‐mechanical System (MEMS). By analyzing the Hamaker micro continuum medium and solid physics principle, the consistency model...
