Improved low kV performance for S-4700 FESEM

Keywords: Imaging, Resolution

Hitachi High-Technologies Corporation reports a number of improvements for the S-4700 field emission SEM, which give significantly better image quality,particularly at low accelerating voltages. These include the introduction of a new snorkel objective lens and a new TTL (through-the-lens) detection system

The new lens has been designed using the latest electron optical theory and is said to allow a guaranteed resolution of just 2.1 nm to be obtained at an accelerating voltage of 1 kV. Resolution of 1.5 nm at 15 kV and 12mm working distance (the X-ray analysis position) is retained with the new lens.

According to Hitachi the new TTL detection system not only provides Ultra-High-Resolution performance using E x B energy filtered Secondary Electrons(SE), but also allows mixing of SE and BSE (Backscattered Electrons) using a retarding/ accelerating plate. This eliminates charging problems and allows imaging of atomic number contrast of any sample at low accelerating voltages.

Examples of the ultra-high resolution imaging are shown in a brand new brochure for the S-4700, together with the imaging capabilities provided by the new E X B filter electron detector.

Details available from: Hitachi High- Technologies Corporation, Tel: +44 (0)118 932 8632; Fax: +44 (0)118 932 8779; E-mail: info@hitachi-hitec-uk.com