Keywords: Microelectronics industry
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Journal Articles
Journal Articles
Rapid Prototyping Journal (2001) 7 (4): 207–211.
Published: 01 October 2001
... on the experience gained from MicroElectroMechanical Systems (MEMS). A goal of this review paper is to emphasise the main problems and to discuss already known examples of functionally graded tool synthesis based on rapid prototyping methods. © MCB UP Limited 2001 Microelectronics industry Mechanical...

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