MEMS scanning mirror
MEMS scanning mirror
Keywords: Microelectronics, Scanners, Lasers
Applicant: Intermec IP Corporation, Woodland Hills, USA Patent number: US6,155,490Publication date: 5 December 2000 Title: Microelectromechanical Systems Scanning Mirror for a Laser Scanner
This invention relates to a microelectromechanical system (MEMS) which functions as a scanning mirror for a laser scanner. It describes a light beam scanner comprising a light source providing a beam of light and an MEMS scanning mirror which reflects the beam of light through an optically transparent window. A light detector receives the light that is reflected off a target and which passes back through the window. The MEMS scanning mirror oscillates to provide a scan pattern to the beam of light and comprises a resonate transducer in order to oscillate the reflective surface to provide a desired scan pattern.
The MEMS scanning mirror described is much smaller, quicker, and more precise than other conventional scanner mirror designs and many similar designs. The device may be manufactured in association with the scanner electronics in a similar type of manufacturing process. This will improve manufacturing time and cost savings and increase reliability.
