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Volume 10, Issue 4
1 April 1990
Sensor Review Cover Image for Volume 10, Issue 4
Review Article| April 01 1990

Tutorial: silicon micro‐machining

Paul Wilson
Paul Wilson
Fulmer Research Ltd
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Author & Article Information
Publisher: Emerald Publishing
Online ISSN: 1758-6828
Print ISSN: 0260-2288
© MCB UP Limited
1990
Sensor Review (1990) 10 (4): 178–181.
https://doi.org/10.1108/eb007830

This extract from a recent survey of micro‐machining in the USA outlines the techniques and difficulties of this ‘upwardly mobile’ technology.

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© MCB UP Limited
1990
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