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Laser interferometry‐based sensing (LIS) technique has been proposed and established recently to track and perform dynamic measurements on a moving end‐effector of a robot manipulator. In this paper, a technique using LIS system to perform guidance of a manipulator is proposed. The LIS system is used as a sensor to guide the end‐effector of a robot manipulator. This is to be accomplished through the implementation of guidance error determination and compensation, and path generation in the control algorithm. This technique can be used to accurately guide the manipulator’s end‐effector to a specified location or along a specified path with a high level of accuracy. The structure and various components within the system and the control strategy are also presented.

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