Skip to Main Content
Article navigation
Volume 7, Issue 2
1 February 1987
Sensor Review Cover Image for Volume 7, Issue 2
Review Article| February 01 1987

Sensor fabrication: micromachining marches on Available to Purchase

Author & Article Information
Publisher: Emerald Publishing
Online ISSN: 1758-6828
Print ISSN: 0260-2288
© MCB UP Limited
1987
Sensor Review (1987) 7 (2): 83–84.
https://doi.org/10.1108/eb007718

Micromachining is becoming an increasingly important technique in sensor fabrication and could have huge potential commercially, as Stephen McClelland explains.

This content is only available via PDF.
© MCB UP Limited
1987
You do not currently have access to this content.
Don't already have an account? Register

Purchased this content as a guest? Enter your email address to restore access.

Please enter valid email address.
Email address must be 94 characters or fewer.
Pay-Per-View Access
$41.00
Rental
This article is also available for rental through DeepDyve. Read this now at DeepDyve
99 Views
View Metrics
Research status and development trends of flexible blood pressure sensors
In2O3/TiO2 sensor sensitivity to triethylamine gas: effects of temperature, humidity, composite ratio
A degree-of-freedom analysis-driven configuration design approach for the capacitive compliant parallel six-axis force/torque sensors
Advancing psychiatric care with biosensors: regulatory and technological considerations in the US and Europe

Suggested Reading

Micromachine update from Japan
Sensor Review (March,1999)
Micromachined gyroscopic sensors
Sensor Review (March,1999)
Micromachined accelerometer with microprocessor controlled self‐test procedure
Sensor Review (March,2001)
Micromachined high sensitivity thermal inclinometer
Sensor Review (July,2006)
Micromachined sensor design for optical‐fiber flow measurement
Sensor Review (March,2005)

Related Chapters

James March’s Lessons on Teaching
Carnegie goes to California: Advancing and Celebrating the Work of James G. March
A Few Notes on Jim March as a Mentor
Carnegie goes to California: Advancing and Celebrating the Work of James G. March
Marching to the Sea: Little Ideas and Small Innovations in the Evolution of Amphibious Operations
Carnegie goes to California: Advancing and Celebrating the Work of James G. March

Recommended for you

These recommendations are informed by your reading behaviors and indicated interests.

Cited By

Google Scholar
This Feature Is Available To Subscribers Only

or Create an Account

Close Modal
Close Modal