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Sensor Technology and Devices

Edited by L. RisticArtech House1994524 pp.ISBN 0-89006-532-2£78.00Keyword Sensors

Intended for practising engineers, researchers and advanced students in the field of sensor development and application, the multi-authored work sets out to provide a broad ranging treatise of modern sensor technology and devices. There are four main topic sections of the book in addition to the introduction which sets out the context of modern microsensors, systems and the industry in general. The four areas singled out as headings for inclusion are modelling, sensor technology, devices and applications and specific circuits for sensors. The multi-author format tends to mean that the chapters are essentially self contained and allow easy access to very specific information, from both active academics in the field and commercial sources (in the main Motorola).

Though specialist in nature the material varies in technical depth. For example the chapter on automotive sensors is in the main applications information for current and future products and is essentially non-analytic in nature, whereas in contrast the chapter on modelling is mathematically based and very detailed. The technology of micromachining is covered in some depth, with one chapter each dedicated to bulk micromachining and surface micromachining techniques, both chapters well illustrated with micrographs of structures in addition to plentiful diagrams illuminating the text. A further chapter covers silicon direct wafer bonding, and another the issues of packaging sensor structures for use, in contrast to the packaging of standard semiconductor devices. Specific measurands form the focus for chapters on magnetic field sensors, thermal sensors, photosensors and a further chapter dedicated to charge coupled devices(CCD). The book is rounded off with two chapters covering the peripheral electronic circuitry typically integrated with the micromachined sensor, both the signal processing circuitry suitable for the variety of sensing methods, and a chapter dedicated to the use of controlled oscillators in sensor circuits.

In summary an advanced text, though the majority of the content can be read quite easily by the interested non specialist; in addition the extensive referencing of each chapter offers an impressive literature resource. Springing from the experience of a broad range of expertise, the book offers a good insight into this multidisciplinary field.

Paul Abbott

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