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Keywords: Batch manufacturing
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Journal Articles
Journal:
Sensor Review
Sensor Review (2009) 29 (3): 260–265.
Published: 26 June 2009
... with stable reproducibility and ease in its implementation. J. Akhtar can be contacted at: jamil@ceeri.ernet.in © Emerald Group Publishing Limited 2009 Resistors Silicon Films (states of matter) Batch manufacturing In the fabrication of polysilicon piezoresistive pressure sensor...
Journal Articles
Journal:
Sensor Review
Sensor Review (2003) 23 (4): 311–315.
Published: 01 December 2003
... is suitably incorporated in the process so that it is also used for the back‐to‐front alignment. The proposed process is cost‐effective and suitable for the batch fabrication of the pressure sensor. © MCB UP Limited 2003 Sensors Microsensors Batch manufacturing Sensitivity of a MEMS based...
