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Keywords: Bio-MEMS
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Journal Articles
Journal:
Sensor Review
Sensor Review (2023) 43 (5-6): 332–346.
Published: 14 August 2023
... Micropump Piezoelectric Bio-MEMS As a result of the use of passive valves, the fluid flow is rectified, and leakage is reduced to the lowest possible level. This allows the micropump to be used for drug delivery due to the low leakage and lack of influence of the actuation part on the transferred...
