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Keywords: Bulk micromachining
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Journal Articles
Journal:
Sensor Review
Sensor Review (2012) 32 (1): 59–65.
Published: 20 January 2012
... electromigration limit of platinum (around 10 mA/μm2) (Lao et al., 2000). Mahanth Prasad can be contacted at: mahanth.prasad@gmail.com © Emerald Group Publishing Limited 2012 Microhotplate Heater Bulk micromachining Gas sensor Temperature coefficient of resistance...
