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Keywords: COMSOL Multiphysics
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Journal Articles
Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications
Available to Purchase
Journal:
Sensor Review
Sensor Review (2024) 44 (4): 462–476.
Published: 21 May 2024
... The validation of analytical results is accomplished through finite element analysis using the software COMSOL Multiphysics. The best configuration, which uses a partial triple-turn configuration, was able to achieve a sensitivity of 116.00 mV/V/MPa over a simulated pressure range of 0 to 500 KPa. Originality...
