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Keywords: Compound MEMS vector hydrophone
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Journal Articles
Journal:
Sensor Review
Sensor Review (2020) 40 (2): 191–201.
Published: 31 March 2020
.... In this paper, a compound MEMS vector hydrophone which contains cilia vector microstructure and piezoelectric ceramic tube has been presented to solve the problem. Compared with traditional MEMS vector hydrophone, the compound MEMS vector hydrophone can realize the measurement of sound pressure and vibration...
