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Keywords: Cross-beam membrane (CBM) structure
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Journal Articles
Journal:
Sensor Review
Sensor Review (2014) 34 (4): 367–373.
Published: 26 August 2014
...Bian Tian; Yulong Zhao; Zhe Niu; Jiang Zhuangde Purpose – The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the dynamic characteristics of the proposed device. Design...
