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Keywords: Deep silicon etching process
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Journal Articles
Journal:
Sensor Review
Sensor Review (2026) 46 (5): 725–736.
Published: 06 January 2026
... by systematically optimizing these critcal manufacturing and packaging processes. Design/methodology/approach In this paper, a backside-sensing miniature flat high-temperature pressure sensor is designed. Through simulations and experiments, the optimal doping process and deep silicon etching process...
