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Keywords: Diaphragm deflection
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Journal Articles
Journal:
Sensor Review
Sensor Review 1–11.
Published: 07 October 2026
...Mahua Raha Patra; Kalyan Biswas; Subhashis Roy; Buddhadev Pradhan Purpose The simultaneous maximization of a MEMS pressure sensor diaphragm’s deflection and resonance frequency are two essential but entirely contradictory objectives for maximum performance. Selection of proper material which has...
