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Keywords: Disk gyroscope
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Journal Articles
A temperature compensation method for MEMS disk solid wave gyroscope based on SSA-VMD and RF-GSO-GRU algorithm
Available to Purchase
Journal:
Sensor Review
Sensor Review (2025) 45 (5): 721–737.
Published: 26 May 2025
... a layer of photoresist with a first predetermined thickness on the upper surface of the preprocessed single crystal silicon. MEMS Disk gyroscope SSA-VMD RF-GSO-GRU Temperature compensation EKF Micro electro mechanical system (MEMS) is widely used in the field of navigation and control...
