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Keywords: Electromechanical sensors
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Journal Articles
Pavel Baranov, Tamara Nesterenko, Evgenii Barbin, Aleksej Koleda, Shuji Tanaka, Takashiro Tsukamoto, Ivan Kulinich, Dmitry Zykov, Alexander Shelupanov
Journal:
Sensor Review
Sensor Review (2019) 39 (5): 670–681.
Published: 26 June 2019
... and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent...
