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Keywords: Localized stiffness
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Journal Articles
Enhanced MEMS piezoresistive pressure sensor through silicon carbide diaphragm and chromium rod beams support integration in robust environmental sustainability
Available to Purchase
Journal:
Sensor Review
Sensor Review (2025) 45 (5): 610–624.
Published: 29 April 2025
... is to improve the localized stiffness, linearity and sensitivity by integrating Chromium rod beams into the Silicon Carbide (SiC) diaphragm and SiC piezoresistors. This will provide a sophisticated solution for harsh environment applications in the automotive, medical, industrial domains and energy and power...
