... level, a PMUT array with a cross-equidistant arrangement based on scandium-doped aluminum nitride was fabricated using standard MEMS processes. The compact layout achieved a 45.45% increase in the fill factor, significantly enhancing reception sensitivity. At the algorithmic level, the speech...

...Xinwang Wang; Huiliang Cao; Shaoheng Chun; Chao Yan; Fei Ye Purpose This study aims to propose a “double closed-loop” control circuit to eliminate quadrature error based on micro electro mechanical system ( MEMS ) multi-ring disk gyroscope ( MRDG ). Design/methodology/approach First of all...

...Jia Song; Yao Yongchao; Lu Junqiang; Men Baiyong; He Zhanxiang; Wang Caixia; Yang Hui Purpose The purpose of this paper is to design, build and validate a cost-effective triaxial MEMS seismometer (TerraSense), aiming to provide a practical monitoring tool for urban subsurface risk assessment...

... focus in the advancement of MEMS technology. In this paper, a design strategy for a high-frequency ultrasonic transducer array based on aluminum nitride (AlN) is proposed. Design/methodology/approach This paper proposes a design scheme for a high-frequency ultrasonic transducer array based on AlN...

... 11 2025 19 11 2025 © 2026 Emerald Publishing Limited 2025 Emerald Publishing Limited Licensed re-use rights only Piezoelectric effect Vector hydrophone MEMS Piezoelectric film National Natural Science Foundation of China U23A20362 and 52275578 This research...

... rhle_16@163.com 30 04 2025 20 06 2025 18 08 2025 22 08 2025 24 08 2025 © 2025 Emerald Publishing Limited 2025 Emerald Publishing Limited Licensed re-use rights only MEMS Attitude estimation Deep learning Adaptive attention mechanism Fourier analysis...

...Xinwang Wang; Ying Cui; Xin Zhang; Huiliang Cao Purpose This study aims to propose a temperature error compensation model based on fusion algorithm. Design/methodology/approach First, the structure and basic working principle of micro electro mechanical system (MEMS) disk solid wave gyroscope...

...Nuo Cheng; Haoxuan Li; Renxin Wang; Peng Zhang; LiCheng Jia; Guojun Zhang; Wendong Zhang; Yuhua Yang Purpose This paper aims to present the design of a micro-electro-mechanical system (MEMS)-based three-dimensional combined vector hydrophone tailored for unmanned underwater vehicles (UUVs...

... gained attention and development. However, the clarity of detection results remains a challenge. This paper aims to present the design of a MEMS three-dimensional vector wake sensor. Compared to similar sensors, the MEMS three-dimensional vector wake sensor offers improved propeller wake measurement...

... network is improved by embedding the global grouped coordinate attention mechanism module and the improved bidirectional feature pyramid network. Firstly, a data acquisition system was built using a MEMS-integrated PCG-ECG sensor to construct a private data set. Second is the time-frequency transformation...

...Jiaxing Wu; Wang Renxin; Xiangkai Zhang; Haoxuan Li; Guochang Liu; Xuejing Dong; Wendong Zhang; Guojun Zhang Purpose This study aims to design a small-size conformable flexible micro-electro-mechanical system (MEMS) vector hydrophone to meet the miniaturization requirements of unmanned underwater...

... ) } Lizhen Cui can be contacted at: lizhencui@163.com 13 04 2024 22 08 2024 07 10 2024 09 10 2024 © Emerald Publishing Limited 2024 Emerald Publishing Limited Licensed re-use rights only Neural network Gait recognition PDR MEMS IMU Indoor positioning...

...Junhui Zhang; Sai Zhang; Yuhua Yang; Wendong Zhang Purpose Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction...

... 03 2024 26 03 2024 11 04 2024 © Emerald Publishing Limited 2024 Emerald Publishing Limited Licensed re-use rights only MEMS Polysilicon Piezoresistive sensor FEA COMSOL Multiphysics MATLAB Micro-electromechanical systems (MEMS) sensors are a class...

... signals can achieve long-distance propagation in water. To meet the requirements of long-distance underwater detection and communication, this paper aims to propose an micro-electro-mechanical system (MEMS) flexible conformal hydrophone for low-frequency underwater acoustic signals. The substrate...

...-solid interaction is simulated using COMSOL Multiphysics 5.3a. Sajjad Habashi Youvalari can be contacted at: sajjad.habashi@gmail.com 04 01 2023 26 05 2023 21 07 2023 © Emerald Publishing Limited 2023 Emerald Publishing Limited Licensed re-use rights only MEMS...

... gist to the researchers of the similar domain at one place. Design/methodology/approach Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers...

...Saeed Khankalantary; Saeed Ranjbaran; Hassan Mohammadkhani Purpose Laboratory calibration methods are time-consuming and require accurate devices to find the error coefficients of the low-cost microelectromechanical system (MEMS) accelerometer. Besides, low-cost MEMS sensors highly depend...

...Huiliang Cao; Rang Cui; Wei Liu; Tiancheng Ma; Zekai Zhang; Chong Shen; Yunbo Shi Purpose To reduce the influence of temperature on MEMS gyroscope, this paper aims to propose a temperature drift compensation method based on variational modal decomposition (VMD), time-frequency peak filter (TFPF...

... energy dispersive X-ray (EDX). This article incorporated the benefit of three technologies, i.e. thin-film, NPs and micro-electro-mechanical systems (MEMS), to selectively capture the Hg²⁺ at the pM concentration. The NPs-based sensing for HMIs is very popular, but the excess usage...