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Keywords: MEMS pressure sensing principles
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Journal Articles
A review of principles of MEMS pressure sensing with its aerospace applications
Available to Purchase
Journal:
Sensor Review
Sensor Review (2019) 39 (5): 652–664.
Published: 11 July 2019
... center, radius of the diaphragm and applied pressure, respectively. D is the Flexural rigidity given by: MEMS MEMS aerospace applications MEMS pressure sensing principles There are different principles used for sensing pressure, which include piezoelectric, piezoresistive...
