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Keywords: Mechanical resonator structure
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Journal Articles
Journal:
Sensor Review
Sensor Review (2022) 42 (2): 263–273.
Published: 18 January 2022
... of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements. Findings In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology...
