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Keywords: Micro
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Journal Articles
Journal:
Sensor Review
Sensor Review (2023) 43 (5-6): 318–331.
Published: 24 August 2023
... without a power supply. Originality/value The relationship between temperature and humidity coupling and the response of the sensor was obtained. The nano-film material was integrated with the MEMS process. It is expected to be practically applied in the future. Micro Room temperature...
