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Keywords: Microelectromechanical system (MEMS)
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Journal Articles
Fabrication and testing of PMOS current mirror-integrated MEMS pressure transducer
Available to Purchase
Journal:
Sensor Review
Sensor Review (2020) 40 (2): 141–151.
Published: 20 December 2019
... and microelectromechanical system (MEMS) techniques for pressure sensing application. The channel length and width of the p-channel MOSFETs are 100 µm and 500 µm, respectively. The MOSFET M1 of the current mirror is the reference transistor that acts as the constant current source. MOSFETs M2 and M3...
