Keywords: Microelectromechanical systems (MEMS)
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Journal Articles
Sensor Review (2025) 45 (6): 898–908.
Published: 05 June 2025
... Emerald Publishing Limited Licensed re-use rights only Sensitivity Microelectromechanical systems (MEMS) Directivity Cilia Vector hydrophone This work was supported by the National Key Research and Development Project of China (Grant No. 2023YFB3208004), the National Natural Science...

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