... and longitudinal magnetic field. The influence of different field annealing directions on GMI effect and impedance Z, resistance R and reactance X with a series of line width have been deeply analyzed. Findings In comparison with GMI sensors microfabricated by unannealed and transversal field annealed ribbons...

... Membranes Finite element method Micro-Electro-Mechanical Systems Piezoresistance Anisotropic etching Microfabrication Double cavities MEMS pressure sensors have been commercially available for several decades. In 1962, the first integrated silicon piezoresistive pressure sensor with a diffused...

... convincing manner. The tin oxide sensor hydrogen response law was linear in conductivity with gas concentration and this fact was central to the analysis. © MCB UP Limited 2001 Sensors Conferences Microfabrication Gas Nanotechnology This conference was attended by approximately...