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Keywords: Microhotplate
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Journal Articles
Journal:
Sensor Review
Sensor Review (2012) 32 (1): 59–65.
Published: 20 January 2012
...Mahanth Prasad; R.P. Yadav; V. Sahula; V.K. Khanna Purpose The purpose of this paper is to help reduce power consumption by using platinum‐based microhotplate with different dielectric membranes SiO2 and Si3N4 for gas sensing applications, and to develop platinum lift‐off process using DC...
