...S.P. Beeby; N.J. Grabham; N.M. White This paper describes a self‐test procedure for a micromachined silicon accelerometer realized using a commercially available microprocessor. The accelerometer is fabricated using a combination of thick‐film printing and silicon micromachining. It consists...

...Yoshihiro Kusuda This article reports on the 4th International Micromachine Symposium and Exhibition Micromachine (1998) which were held in Tokyo, 28‐30 October 1998 and also serves as a supplementary information to the article “Micro sensor developments in Japan” in this special “Micro sensors...

...Gareth J. Monkman Discusses the demise of the thermeonic valve and the firm establishment of the transistor as the major active component in electronic circuits. Electronics Micromachining Valves I was perhaps one of the fortunate few whose time as a young technical college student...

...Kazuhiro Tsuruta; Yoshikazu Mikuriya; Yuichi Ishikawa This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991...

...Rob Yates Many new micromachined angular rate sensors (gyroscopes) are now commercially available. Their rapid development has been mainly due to the automotive industry. A wide range of different devices exists and their performance is significantly improving every year while costs are falling...