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Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Dadasikandar Kanekal, Eshan Sabhapandit, Sumit Kumar Jindal, Hemprasad Yashwant Patil
Journal: Sensor Review
Sensor Review (2024) 44 (4): 462–476.
https://doi.org/10.1108/SR-02-2024-0115
Published: 21 May 2024
... 03 2024 26 03 2024 11 04 2024 © Emerald Publishing Limited 2024 Emerald Publishing Limited Licensed re-use rights only MEMS Polysilicon Piezoresistive sensor FEA COMSOL Multiphysics MATLAB Micro-electromechanical systems (MEMS) sensors are a class...
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