Keywords: Polysilicon
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Journal Articles

Formulation analysis and follow-up study of multi-turn configuration for performance enhancement of MEMS piezoresistive pressure sensor utilized for low-pressure measurement applications

Dadasikandar Kanekal, Eshan Sabhapandit, Sumit Kumar Jindal, Hemprasad Yashwant Patil
Journal: Sensor Review
Sensor Review (2024) 44 (4): 462–476.
https://doi.org/10.1108/SR-02-2024-0115
Published: 21 May 2024
...Dadasikandar Kanekal; Eshan Sabhapandit; Sumit Kumar Jindal; Hemprasad Yashwant Patil Purpose The purpose of this research is to study the performance of piezoresistive pressure sensors using polysilicon as the piezoresistive material, which is typically used to measure pressure in high...
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