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Keywords: Positioning stage
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Journal Articles
Journal:
Sensor Review
Sensor Review (2023) 43 (3): 221–230.
Published: 05 May 2023
... at: cpchang@mail.ncyu.edu.tw Linear encoder Ultrasonic transducer Heterodyne signal processing Frequency multiplication Positioning stage MOST 111-2221-E-415-011 MOST 109-2813-C-415-046-E National Science and Technology Council, ROC (Taiwan) MOST 111-2221-E-415-011 MOST 109-2813-C...
