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Keywords: Pressrue
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Journal Articles
Design optimization of a high-sensitive absolute micro-pressure sensor
Available to Purchase
Journal:
Sensor Review
Sensor Review (2014) 34 (3): 312–318.
Published: 10 June 2014
... to decrease the dynamic interference is designed. MEMS Piezoresistive Pressrue Sensor © Emerald Group Publishing Limited 2014 To assess the dynamic performance approximately, another BMDI sensor die from the same silicon wafer, but with a through-hole on the glass base, is utilized...
