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Keywords: Pressure transducer
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Journal Articles
Fabrication and testing of PMOS current mirror-integrated MEMS pressure transducer
Available to Purchase
Journal:
Sensor Review
Sensor Review (2020) 40 (2): 141–151.
Published: 20 December 2019
... mirror-integrated pressure transducer. Design/methodology/approach Using the concept of piezoresistive effect in a MOSFET, three identical p-channel MOSFETs connected in current mirror configuration have been designed and fabricated using the standard polysilicon gate process...
