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Keywords: Resistors
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Journal Articles
A wet‐etch method with improved yield for realizing polysilicon resistors in batch fabrication of MEMS pressure sensor
Available to Purchase
Journal:
Sensor Review
Sensor Review (2009) 29 (3): 260–265.
Published: 26 June 2009
... with stable reproducibility and ease in its implementation. In the fabrication of polysilicon piezoresistive pressure sensor using silicon bulk micromachining, polysilicon resistors are realized on the silicon diaphragm in full or half wheatstone bridge configuration (Akhtar et al., 2003a). A large...
