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Keywords: SOI
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Journal Articles
Research on sensitivity simulation and optimization of SOI pressure-sensitive chip
Available to Purchase
Journal:
Sensor Review
Sensor Review (2025) 45 (6): 801–809.
Published: 01 May 2025
..., the factors influencing the sensitivity of Silicon On Insulator (SOI) pressure-sensitive chips are analyzed. These factors primarily include the crystal orientation of the chip material, impurity concentration, the position of the piezoresistor on the chip surface and the dimensions of the piezoresistor grid...
