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Keywords: ScAlN
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Journal Articles
Journal:
Sensor Review
Sensor Review 1–11.
Published: 11 September 2026
... PMUT ScAlN Contact-type sensory array ResNet Speech recognition Deep learning Piezoelectric MEMS MEMS fabrication Acoustic National Natural Science Foundation of China 62201521 Shandong Province Science and Technology SMES Innovation Ability Improvement Project No.2024TSGC0203...
