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Keywords: Sealing processes
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Journal Articles
Fabrication of a membrane type double cavity vacuum‐sealed micro sensor for absolute pressure based on front‐side lateral etching technology
Available to Purchase
Journal:
Sensor Review
Sensor Review (2011) 31 (1): 41–46.
Published: 25 January 2011
... Kumar Rathore can be contacted at: rpradeep.tu@gmail.com © Emerald Group Publishing Limited 2011 Pressure Sensors Membranes Sealing processes MEMS chip size: 1×1 mm; membrane size: 100×30 μm; membrane thickness: 1.7 μm; resistor's length: 60...
