Keywords: Sealing processes
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Journal Articles

Fabrication of a membrane type double cavity vacuum‐sealed micro sensor for absolute pressure based on front‐side lateral etching technology

Pradeep Kumar Rathore, Jamil Akhtar
Journal: Sensor Review
Sensor Review (2011) 31 (1): 41–46.
https://doi.org/10.1108/02602281111099071
Published: 25 January 2011
.../MPa. Originality/value The paper shows that front‐side lateral etching technology is feasible in the fabrication of small vacuum‐sealed cavities and absolute pressure sensors. Pressure Sensors Membranes Sealing processes MEMS A composite layer of PECVD Si3N4...
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